Title :
Multilevel Ge-Se Film Based Resist Systems
Author :
Tai, K.L. ; Vadimsky, R.G. ; Ong, E.
Author_Institution :
Bell Laboratories Murray Hill, N. J. 07974
Keywords :
Lithography; Nonlinear optics; Optical diffraction; Optical films; Optical polymers; Phase change materials; Polymer films; Printers; Resists; Silver;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
