Electron Beam Testing or VLSIs

Electron beam testing has many advantages, such as the electron beam diameter of the order of micrometers or less, no loading capacitance, high operating frequencies and nondestructive testing. Therefore, if we choose appropriate acceleration voltages to avoid the charging of devices, it will be a very useful tool for VLSI internal measurements. And it is possible to reduce the turnaround time of redesigns and to get much information for optimizing the design in a shorter time.