DocumentCode

472894

Title

Latch-Up Elimination in High Density CMOS

Author

Chen, John Y.

Author_Institution

Hughes Research Laboratories 3011 Malibu Canyon Road Malibu, CA 90265

fYear

1983

fDate

13-15 Sept. 1983

Firstpage

54

Lastpage

55

Keywords

Annealing; CMOS process; CMOS technology; Circuits; Doping; FETs; Furnaces; Implants; Laboratories; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1983. Digest of Technical Papers. Symposium on

Conference_Location

Maui, HI, USA

Print_ISBN

4-930813-05-0

Type

conf

Filename

4480634