DocumentCode
472899
Title
A New Algorithm for Reticle Inspection
Author
Yoshikawa, Ryoichi ; Sasaki, Sadao
Author_Institution
IC Laboratory, Toshiba R and D Center Kawasaki, Japan
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
66
Lastpage
67
Keywords
Distribution functions; Inspection; Laboratories; Optical sensors; Optical signal processing; Photodiodes; Research and development; Sensor phenomena and characterization; Signal processing algorithms; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480639
Link To Document