DocumentCode
474684
Title
High-index-contrast AlGaAs waveguide scattering loss reduction via oxidation smoothing of sidewall roughness
Author
Seibert, Christopher S. ; Liang, Di ; Hall, Douglas C. ; Shellenbarger, Zane A.
Author_Institution
Dept. of Electr. Eng., Notre Dame Univ., Notre Dame, IN
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
The propagation loss of single mode high index contrast AlGaAs ridge waveguides is reduced nearly three orders of magnitude (at 1 cm guide length) through application of a nonselective wet oxidation sidewall roughness smoothing technique.
Keywords
III-V semiconductors; aluminium compounds; optical fabrication; optical losses; optical waveguides; oxidation; ridge waveguides; surface roughness; AlGaAs; high-index-contrast AlGaAs waveguide; nonselective wet oxidation; propagation loss; ridge waveguide; scattering loss reduction; sidewall roughness; smoothing technique; Etching; III-V semiconductor materials; Light scattering; Optical scattering; Optical waveguides; Oxidation; Particle scattering; Propagation losses; Smoothing methods; Waveguide lasers; (130.2790) Guided Waves; (290.5880) Scattering, Rough Surfaces;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4572416
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