• DocumentCode
    475452
  • Title

    Simulation of thermally stable chamber designed for testing LTCC structures

  • Author

    Bienkowski, A. ; Bembnowicz, P. ; Roguszczak, H. ; Golonka, L.J.

  • Author_Institution
    Wroc¿aw University of Technology, POLAND
  • fYear
    2008
  • fDate
    19-21 June 2008
  • Firstpage
    355
  • Lastpage
    358
  • Abstract
    A chamber providing thermally stable environment for LTCC (Low Temperature Co-fired Ceramics) structures testing is designed and fabricated. Such device can be applied in a wide range of preliminary testing stages of the LTCC based Microsystems, especially microfluidic one. The aim is to obtain good temperature uniformity and stability. A steady state thermal simulation is done and evaluated with infrared thermography.
  • Keywords
    Ceramics; Cooling; Fabrication; Heat transfer; Heating; Microfluidics; Sensor arrays; Temperature dependence; Temperature sensors; Testing; Chamber; FEM; LTCC; Thermal distribution;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Mixed Design of Integrated Circuits and Systems, 2008. MIXDES 2008. 15th International Conference on
  • Conference_Location
    Poznan, Poland
  • Print_ISBN
    978-83-922632-7-2
  • Electronic_ISBN
    978-83-922632-8-9
  • Type

    conf

  • Filename
    4600933