DocumentCode
475452
Title
Simulation of thermally stable chamber designed for testing LTCC structures
Author
Bienkowski, A. ; Bembnowicz, P. ; Roguszczak, H. ; Golonka, L.J.
Author_Institution
Wroc¿aw University of Technology, POLAND
fYear
2008
fDate
19-21 June 2008
Firstpage
355
Lastpage
358
Abstract
A chamber providing thermally stable environment for LTCC (Low Temperature Co-fired Ceramics) structures testing is designed and fabricated. Such device can be applied in a wide range of preliminary testing stages of the LTCC based Microsystems, especially microfluidic one. The aim is to obtain good temperature uniformity and stability. A steady state thermal simulation is done and evaluated with infrared thermography.
Keywords
Ceramics; Cooling; Fabrication; Heat transfer; Heating; Microfluidics; Sensor arrays; Temperature dependence; Temperature sensors; Testing; Chamber; FEM; LTCC; Thermal distribution;
fLanguage
English
Publisher
iet
Conference_Titel
Mixed Design of Integrated Circuits and Systems, 2008. MIXDES 2008. 15th International Conference on
Conference_Location
Poznan, Poland
Print_ISBN
978-83-922632-7-2
Electronic_ISBN
978-83-922632-8-9
Type
conf
Filename
4600933
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