Uncertainty in temperature infrared measurements of electronic microcircuits

In accordance with the guide to the expression of uncertainty in measurement published by International Organization for Standardization measurement results should be presented together with their uncertainties (especially it concerns companies and organisations that have been certified to be in conformance with the ISO 9000 and EN 45000 standards). In temperature measurements, also in electronics, infrared cameras are very often used. In electronics the two typical temperature measurement methods are used. A diagram of the typical measurement system used in emissivity and temperature measurements of electronic microcircuits and a number of factors influencing the uncertainty of temperature measurements together with methods of compensation for these influences are presented and discussed in the paper. A procedure for calculation of the relative combined standard uncertainty of temperature measurement has been proposed. The uncertainty calculation results enable one to evaluate generally the temperature measurement uncertainties and to determine the conditions of obtaining low values of these uncertainties.