Single post load cell in LTCC

This paper presents the development of a force post compressive load cell, fabricated using Low Temperature Cofired Ceramics (LTCC) technology. It was implemented an LTCC mechanical load cell structure with a z-axis thick film strain gage using two different approaches. Fabrication methods and materials are explored and fabricated devices are presented. Mechanical characterization tests are still in progress, but preliminary load tests with compressive forces were found to exhibit consistent behavior, in a strain level up to 1.500 micro strain.