Simulation Research on Production Scheduling of Semiconductor Probing System

In view of semiconductor probe system´s production scheduling problem, with the thought of object-oriented, a probe behavior model is set up in terms of the figuration of UML which is a model tool. It uses the SimTalk brought by EM-plant to transform behavior model directly into simulation model. By analyzing the experimental result of simulation model, the influence of the wafer releasing speed and machine dispatching upon system performance indicators such as system capability, production cycle, utilization of machines and quantity of work in process are got. It supplies the decision maker with evidence.