Study on Precision Positioning System of Two-Dimensional Platform Based on High-Speed and Large-Range

A two-dimensional ultra-precision positioning system with high-speed and large-range which can be used in a micro-nanometer machining has been studied in this paper. The macro-micro dual-drive system is used to satisfy these positioning requirements. Because of the strong nonlinearity of the piezoelectric devices, such as the hysteresis and the creep, and the influence of the highly accelerated run of the macro-positioning stage, the traditional PID control can not provide a good control performance for this system. According to the positioning accuracy demands of the ultra-precision positioning system, a PID position controlling system based on adaptive neural-fuzzy inference is proposed in this paper. The experimental data show that the performance of the intelligent control is much better than that of the traditional PID control. The repeated positioning error of this system is not more than 10nm grade.