Robust composite controller design for high-accuracy positioning system

The control method for Industrial process is used for the piezoelectric translator (PZT) actuator by equivalent transformation of the model. A new self-tuning approach of IMC based PID control algorithm is presented by integrating the PID control, internal model control (IMC) and feed forward control. The controller is double loop structured and integral square error (ISE) is applied to optimize parameters of the IMC based PID controller after the dynamic performance is improved in the inner loop. The analysis of robustness, simulation of the algorithm and experiment show that the controller is robust and it can response quickly and precisely.