Title :
Square hole fabrication in micro nano scale by low energy ecr ion beam irradiation
Author :
Pahlovy, Shahjada Ahmed ; Momota, Sadao ; Yingxue, Yao ; Kashihara, M. ; Nishimura, Kosuke
Author_Institution :
Intelligent Mechanical System Engineering Department, Kochi University of Technology, 782-8502, Japan
Abstract :
The importance of micro nano fabrication in nanotechnology world becoming greater and greater. Now a days several industries and technology especially IC industry, MEMS, solar cells, optoelectronics and flat panel display, depends on micro fabrication technologies. An easy method for square hole fabrication using highly charged ion (HCI) on Silicon surface is discussed. For several advantages and unique features including high reactivity and stopping power enhancement HCI was used during the experiment.
Keywords :
Electron Cyclotron Resonance; ion beam irradiation; mechanical properties;
Conference_Titel :
Technology and Innovation Conference, 2006. ITIC 2006. International
Conference_Location :
Hangzhou
Print_ISBN :
0-86341-696-9
