Improving the localization of electrochemical micro-manufacturing with nanosecond pulse duration

With the development of MEMS, electrochemical micro-manufacturing, as a part of micro-machining, has been attached much attention. In electrochemical manufacturing, localization is closely related with the accuracy, and the accuracy will be improved when the localization is enhanced. In our paper, the nanosecond pulse duration power generator is employed to enhance the localization. Micro holes are electrochemical drilled in nickel using nanosecond pulse power, millisecond pulse power and direct current power. The experimental results show that the localization could be significantly enhanced using nanosecond pulse power. The maximum localization is got at the pulse duration of 10ns. Cu dots are electrodeposited using nanosecond pulse power, millisecond pulse power and direct current power. The results indicate that the localization could be significantly enhanced using nanosecond pulse power. The maximum localization is got at the pulse duration of 200ns and the current is 100mA.