Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification

Author

Hara, Atsushi ; Saiki, Kazuaki ; Sakata, Koichi ; Fujimoto, Hiroshi

Author_Institution

Nikon Corp., Yokohama

fYear

2008

fDate

10-13 Nov. 2008

Firstpage

2509

Lastpage

2514

Abstract

In this paper, simultaneous optimization of mechanism and control is discussed for a high precision stage. We pay attention to zeros of a continuous-time plant, and the relationship between a sensor and zero positions has been clarified. In addition, it has been shown that similar relations are provided in structural change of a plant. After the zero position desired for a control system is shown, the vibration suppression PTC (Perfect Tracking Control) is applied to the plant with that condition. Finally, the effectiveness of proposed methods are verified by a simulation and an experiment.

Keywords

continuous time systems; manufacturing systems; optimisation; precision engineering; vibration control; continuous-time plant; control system; experimental verification; high precision single axis stage; perfect tracking control; simultaneous optimization; vibration suppression PTC; Actuators; Control systems; Design methodology; Design optimization; Force measurement; Laplace equations; Magnetic resonance; Springs; Telephony; Vibration control;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, 2008. IECON 2008. 34th Annual Conference of IEEE

Conference_Location

Orlando, FL

ISSN

1553-572X

Print_ISBN

978-1-4244-1767-4

Electronic_ISBN

1553-572X

Type

conf

DOI

10.1109/IECON.2008.4758351

Filename

4758351