High-speed and high-precision tracking control of large-scale stage using perfect tracking control with disturbance observer

In a control of hard disk drives, perfect tracking control (PTC) method has already obtained high performance. Therefore, the first author and his group study PTC scheme for improving performance of large-scale high-precision stage. Several papers were presented an application of PTC scheme for the control of these stages. In this paper, we investigate a disturbance observer (DOB) which is combined for PTC. The results of simulation and experiment show the advantages of DOB with viscosity model. Finally, it was proved that the combination of PTC and this DOB is very effective strategies for achieving high-speed and high precision tracking control.