ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

Author

Sangameswaran, Sandeep ; De Coster, Jeroen ; Linten, Dimitri ; Scholz, Mirko ; Thijs, Steven ; Haspeslagh, Luc ; Witvrouw, Ann ; Van Hoof, Chris ; Groeseneken, Guido ; De Wolf, Ingrid

Author_Institution

IMEC vzw, Heverlee

fYear

2008

fDate

7-11 Sept. 2008

Firstpage

249

Lastpage

257

Abstract

For the first time a study of electrostatically actuated torsional micromirrors under ESD stress is presented. Together with on-wafer ESD measurements their electrical and mechanical behavior under ESD stress is explained. HBM and MM measurements have been performed and their relevance in calculating the ESD failure level of the micromirrors is compared and discussed in detail. It is demonstrated that these optical MEMS devices have a high sensitivity to ESD and that they need ESD protection.

Keywords

electrostatic actuators; electrostatic discharge; failure (mechanical); micro-optomechanical devices; micromirrors; optical testing; reliability; torsion; electrostatic actuation; electrostatic discharge failure level; electrostatic discharge reliability; electrostatic discharge stress; microelectromechanical systems; optical MEMS devices; torsional micromirrors; Electric variables measurement; Electrostatic discharge; Electrostatic measurements; Mechanical variables measurement; Microelectromechanical systems; Micromechanical devices; Micromirrors; Optical devices; Performance evaluation; Stress measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th

Conference_Location

Tucson, AZ

Print_ISBN

978-1-58537-146-4

Electronic_ISBN

978-1-58537-147-1

Type

conf

Filename

4772141