A MEMS-based multi-sensor system for attitude determination

Author

Alandry, Boris ; Dumas, Norbert ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal

Author_Institution

Univ. Montpellier II, Montpellier

fYear

2009

fDate

1-3 April 2009

Firstpage

261

Lastpage

264

Abstract

This paper presents an original multi-sensor system for 3D orientation determination based on only 4 MEMS sensors. MEMS sensors are manufactured on a cheap standard technology from NXP Semiconductors using TMAH front side wet etching with no additional masking step. This very low cost manufacturing process makes the system suitable for various consumer applications. Electronic architecture for signal conditioning is detailed covering issues regarding the design of piezoresistor based systems (offsets, flicker noise...). Finally, the complete system has been prototyped proving the interest and the feasibility of such devices.

Keywords

attitude measurement; etching; microsensors; piezoresistive devices; resistors; sensor fusion; 3D orientation determination; MEMS-based multisensor system; TMAH front side wet etching; attitude determination; electronic architecture; piezoresistor design; 1f noise; Costs; Manufacturing processes; Micromechanical devices; Piezoresistance; Position measurement; Semiconductor device manufacture; Sensor systems; Signal design; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on

Conference_Location

Rome

Print_ISBN

978-1-4244-3874-7

Type

conf

Filename

4919514