• DocumentCode
    493323
  • Title

    Ambient hot embossing of polycarbonate, poly-methyl methacrylate and cyclic olefin copolymer for microfluidic applications

  • Author

    Toh, A.G.G. ; Wang, Z.F. ; Wang, Z.P.

  • Author_Institution
    Singapore Inst. of Manuf. Technol., Singapore
  • fYear
    2009
  • fDate
    1-3 April 2009
  • Firstpage
    359
  • Lastpage
    362
  • Abstract
    Microfluidic devices offer an attractive route towards the miniaturization of chemical and biological processes in lab-on-chip applications. Lab-on-chips can be fabricated from inexpensive polymers such as polycarbonate (PC), poly-methyl methacrylate (PMMA) and cyclic olefin co-polymers (COC). Hot embossing of polymers is an attractive route to fabricating chips with feature dimensions ranging from a few microns to centimeters. Here, using ambient hot embossing, we present the optimization of key hot embossing parameters (temperature and pressure) for the realization of high mold-to-substrate feature fidelity in PMMA, PC and COC substrates. Taguchi analysis of experiment results indicate that PMMA and PC substrates, as compared to COC substrates, are more responsive to temperature increases above their respective glass transition temperatures. This difference in polymer viscoelastic behavior is proposed to occur due to the variation of the polymers´ dynamic viscosity.
  • Keywords
    embossing; lab-on-a-chip; microfluidics; polymers; COC substrate; PC substrates; PMMA substrate; Taguchi analysis; ambient hot embossing; cyclic olefin copolymer; lab-on-chip application; microfluidic applications; mold-to-substrate feature fidelity; poly-methyl methacrylate; polycarbonate; polymer dynamic viscosity; polymer viscoelasticity; Chemical processes; Chemical technology; Embossing; Glass; Manufacturing processes; Microfluidics; Nickel; Polymers; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-3874-7
  • Type

    conf

  • Filename
    4919528