Title :
Silicon carbide as a material for biomedical microsystems
Author :
Zorman, Christian A.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH
Abstract :
Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties combined with its compatibility with Si micromachining techniques. This paper presents an overview of the latest advancements in this area including on-going research to develop SiC for biosensing, bio-microdevice packaging, bio-filtering, biomedical imaging and other related biomedical applications.
Keywords :
bioMEMS; biomedical imaging; biomedical measurement; biosensors; micromachining; microsensors; semiconductor device packaging; silicon; wide band gap semiconductors; SiC; bio-filtering device; bio-microdevice packaging; biomedical imaging; biomedical microsystems; biosensing device; micromachining; silicon carbide material; Biological materials; Biomedical materials; Chemicals; Crystallization; Mechanical factors; Micromachining; Micromechanical devices; Semiconductor films; Silicon carbide; Substrates;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
