Magnetic field reduction using metal screening for electron microscope: A case study

Author

Ranade, Sulabha R. ; Joshi, Milind Y.

Author_Institution

Soc. for Appl. Microwave Electron. Eng.&Res., Mumbai, India

fYear

2008

fDate

26-27 Nov. 2008

Firstpage

173

Lastpage

175

Abstract

The paper presents the countermeasures to reduce the influence of an external magnetic field in the beam area of an electron microscope that is required to be minimal for achieving accurate image quality of a scanned sample. The requirement of the AC magnetic field due to power line frequency of 50 Hz needs to be below the value of 50 nT peak-peak (17.67 nT RMS) in any direction (X, Y, Z axis), at the installation site of the electron microscope (Tecnai Titan 300 kV system) procured and installed at TIFR, Mumbai. After site inspection and employing the appropriate measure of shielding, the value of the magnetic field was brought down to the acceptable limit of Lt 50 nT.

Keywords

electron microscopes; inspection; magnetic field effects; magnetic shielding; AC magnetic field; electron microscope; external magnetic field; frequency 50 Hz; image quality; magnetic field reduction; magnetic flux density 50 nT; metal screening; power line frequency; site inspection; voltage 300 kV; Electron beams; Electron microscopy; Frequency; Image quality; Inspection; Magnetic field measurement; Magnetic fields; Magnetic force microscopy; Magnetic shielding; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Electromagnetic Interference & Compatibility, 2008. INCEMIC 2008. 10th International Conference on

Conference_Location

Bangalore

Print_ISBN

978-81-903575-1-7

Type

conf

Filename

5154237