DocumentCode
498048
Title
A 31ns random cycle VCAT-based 4F2 DRAM with enhanced cell efficiency
Author
Song, Ki-Whan ; Kim, Jin-Young ; Kim, Huijung ; Chung, Hyun-Woo ; Kim, Hyungi ; Kim, Kanguk ; Park, Hwan-Wook ; Kang, Hyun Chul ; Kim, Sua ; Tak, Nam-kyun ; Park, Dukha ; Kim, Woo-Seop ; Lee, Yeong-Taek ; Oh, Yong Chul ; Jin, Gyo-Young ; Yoo, Jeihwan ; Oh
Author_Institution
ATD and ATD 1, Korea
fYear
2009
fDate
16-18 June 2009
Firstpage
132
Lastpage
133
Abstract
This paper reports a functional 4F2 DRAM based on a vertical-channel-access-transistor (VCAT). A new core design methodology is applied to accommodate 4F2 cell array, achieving both high performance and small area. The 88Kb DRAM array is fabricated in a 50Mb test chip at 80nm design rule and the measured random cycle time (tRC) and read latency (tRCD) is 31ns and 8ns, respectively. The core array size is reduced by 29% compared to conventional 6F2 DRAM.
Keywords
CMOS technology; Circuits; Design methodology; MIM capacitors; Manufacturing; Random access memory; Research and development; Semiconductor device measurement; Testing; Time measurement; 4F2; DRAM; VCAT;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Circuits, 2009 Symposium on
Conference_Location
Kyoto, Japan
Print_ISBN
978-1-4244-3307-0
Electronic_ISBN
978-4-86348-001-8
Type
conf
Filename
5205418
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