DocumentCode
499189
Title
High resolution imaging of optical modes in silicon microdisk cavities based on near-field perturbation
Author
Eftekhar, Ali Asghar ; Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2009
fDate
2-4 June 2009
Firstpage
1
Lastpage
2
Abstract
We demonstrate high resolution near-field imaging of the optical modes profile in high Q silicon microdisks. A spatial resolution of ~20 nm is obtained by characterizing the perturbative effects of a scanning AFM tip on the microdisk transmission.
Keywords
atomic force microscopy; imaging; integrated optics; lattice dynamics; microcavities; high resolution near-field imaging; microdisk transmission; near-field perturbation; optical modes; perturbative effects; scanning AFM; silicon microdisk cavities; High-resolution imaging; Nonlinear optics; Optical coupling; Optical microscopy; Optical resonators; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Silicon; (130.3120) Integrated optics devices; (180.4243) Near-field microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-869-8
Electronic_ISBN
978-1-55752-869-8
Type
conf
Filename
5224268
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