DocumentCode
499296
Title
Frequency scanning laser for high speed phase shifting interferometry
Author
Jang, Roma ; Kim, Jae Wan ; Kang, Chu-Shik ; Kim, Jong-Ahn ; Eom, Tae Bong ; Kim, Jae-Eun ; Park, Hae Yong
Author_Institution
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
fYear
2009
fDate
2-4 June 2009
Firstpage
1
Lastpage
2
Abstract
A Multichannel frequency scanning laser which is to be used as a source in a high speed phase-shifting interferometer to measure 3D profiles of nanostructures is presented.
Keywords
nanostructured materials; phase shifting interferometry; 3D profiles; frequency scanning laser; high speed phase shifting interferometry; nanostructures; Frequency measurement; Frequency modulation; High speed optical techniques; Laser mode locking; Length measurement; Optical interferometry; Phase measurement; Phase shifting interferometry; Resonant frequency; Velocity measurement; (120.3180 ) Interferometry; (120.6660 ) Surface measurements, roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-869-8
Electronic_ISBN
978-1-55752-869-8
Type
conf
Filename
5224376
Link To Document