Inversion of 3-dimensional polymer photonic crystal fabricated by diffractive optics laser lithography

Author

Chanda, Debashis ; Zachari, Nicole ; Haque, Moez ; Yuan, Liang ; Ng, Mi Li ; Herman, Peter R.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada

fYear

2009

fDate

2-4 June 2009

Firstpage

1

Lastpage

2

Abstract

Three-dimensional photonic crystal templates fabricated in polymer by single-step laser exposure through a 2D diffractive optical element have been inverted in silica to provide robust structures with strong photonic stopbands in the telecom band.

Keywords

diffractive optical elements; laser materials processing; optical fabrication; optical polymers; photolithography; photonic crystals; silicon compounds; 2D diffractive optical element; 3D polymer photonic crystal fabrication; SiO₂; diffractive optics laser lithography; photonic stopbands; robust structure; single-step laser exposure; telecom band; Holographic optical components; Holography; Lithography; Optical diffraction; Optical polymers; Photonic crystals; Resists; Scanning electron microscopy; Silicon compounds; US Department of Energy; (090.1970) Diffractive optics; (160.5298) Photonic crystals; (220.4000) Microstructure fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Conference_Location

Baltimore, MD

Print_ISBN

978-1-55752-869-8

Electronic_ISBN

978-1-55752-869-8

Type

conf

Filename

5225045