Title :
Imaging interferometric nanoscopy to the limit of available frequency space
Author :
Kuznetsova, Yuliya ; Neumann, Alexander ; Brueck, S.R.J.
Author_Institution :
Depts. of Phys. & Astron. & Electr. & Comput. Eng., Univ. of New Mexico, Albuquerque, NM, USA
Abstract :
Imaging interferometric microscopy resolution to lambda/2(nsub+1) (nsub=substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (lambda/4.2) is achieved using a 633 nm source and a 0.4 NA lens.
Keywords :
lenses; light interferometry; light reflection; light sources; nanophotonics; optical microscopy; Manhattan test pattern; evanescent-wave illumination; imaging interferometric nanoscopy; light source; optical lenses; optical microscopy; total-internal reflection; wavelength 633 nm; Frequency; High-resolution imaging; Image resolution; Lighting; Optical imaging; Optical interferometry; Optical microscopy; Optical scattering; Optical surface waves; Scanning electron microscopy; (110.3175) Interferometric imaging; (190.0190) Microscopy;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
