Title :
Ultimate miniaturization of single and coupled resonator filters in silicon photonics
Author :
Soltani, Mohammad ; Li, Qing ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Resonator-based filters using oxide-clad silicon microdisks scaled to ultimate miniaturization (radius~1.5-2 mum) close to radiation limit are demonstrated. High-Q (~1.5times105) and single-mode operation in each microdisk enables low insertion-loss and large free-spectral-range filters.
Keywords :
integrated optics; micro-optomechanical devices; micromechanical resonators; optical filters; optical losses; resonator filters; silicon; Si; free-spectral-range filter; insertion-loss; microresonator; miniaturization; oxide-clad silicon microdisks; radius 1.5 mum to 2 mum; resonator filter; silicon photonics; single-mode operation; Bandwidth; Fabrication; Integrated optics; Optical filters; Optical resonators; Photonics; Q measurement; Resonance; Resonator filters; Silicon; (130.3120) Integrated optics devices; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
