Title :
In-situ calibration of a translation stage by low-coherence tandem interferometer
Author :
Hirai, A. ; Kitta, J. ; Matsumoto, H.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Nat. Metrol. Inst. of Japan, Tsukuba, Japan
Abstract :
For remote and in-situ calibration of translation stage, system comparing optical-path-differences of two distantly-located low-coherence-interferometers through a single-mode-optical-fiber has been developed. Results of 52 nm-deviation and 30 nm-standard deviation for 39 mm-displacement is achieved.
Keywords :
light coherence; light interferometers; optical fibres; low-coherence tandem interferometer; optical-path-differences; single-mode-optical-fiber; size 39 mm; translation stage calibration; wavelength 30 nm; wavelength 52 nm; Calibration; Displacement measurement; Interference; Length measurement; Light sources; Mirrors; Optical fibers; Optical interferometry; Position measurement; Vehicles; (120.3180) Interferometry; (120.3930) Metrological instrumentation;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8
