Planar integration of a long range surface plasmon waveguide with an inverted metal-semiconductor-metal photodetector on silicon

Author

Dhar, Sulochana ; Degiron, Aloyse ; Smith, David R. ; Jokerst, Nan M.

Author_Institution

Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA

fYear

2009

fDate

2-4 June 2009

Firstpage

1

Lastpage

2

Abstract

A long range surface plasmon polariton (LR-SPP) insulator-metal-insulator waveguide was integrated with a thin film In_xGa_1-xAs-based photodetector (PD) on silicon for planar detection of LR-SPPs, and demonstrated coupling from the LR-SPP to the PD.

Keywords

III-V semiconductors; elemental semiconductors; gallium arsenide; indium compounds; metal-semiconductor-metal structures; optical planar waveguides; photodetectors; plasmonics; semiconductor thin films; silicon; surface plasmons; thin film devices; In_xGa_1-xAs; Si; insulator-metal-insulator waveguide; inverted metal-semiconductor-metal photodetector; long range surface plasmon waveguide; planar integration; surface plasmon polariton; thin film photodetector; Bonding; Etching; Optical fiber polarization; Optical surface waves; Optical waveguides; Photodetectors; Planar waveguides; Plasmons; Silicon; Surface waves; (130.3120) Integrated optics devices; (250.5403) Plasmonics;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Conference_Location

Baltimore, MD

Print_ISBN

978-1-55752-869-8

Electronic_ISBN

978-1-55752-869-8

Type

conf

Filename

5225839