Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Author

Bönisch, Sven ; Pommerenke, David ; Kalkner, Wilfried

Author_Institution

Tech. Univ. Berlin, Berlin, Germany

fYear

2001

fDate

11-13 Sept. 2001

Firstpage

371

Lastpage

382

Abstract

Different discharge mechanisms are possible for ESD (electrostatic discharge) below 2 kV breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Keywords

discharges (electric); electrodes; electrostatic discharge; scanning electron microscopy; ESD risetimes; breakdown voltage; broadband measurements; discharge mechanism; electrode SEM photograph; electrode material; electrode surface; electrostatic discharge; risetime measurement; scanning electron microscopy; Bandwidth; Charge carriers; Electric breakdown; Electrodes; Electrostatic discharge; Electrostatic measurements; Reproducibility of results; Scanning electron microscopy; Surface discharges; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium, 2001. EOS/ESD '01.

Conference_Location

Portland, OR

Print_ISBN

978-1-5853-7039-9

Electronic_ISBN

978-1-5853-7039-9

Type

conf

Filename

5254945