Title :
Analysis of the triggering behavior of low voltage BCD single and multi-finger gc-NMOS ESD protection devices
Author :
Heer, M. ; Bychikhin, S. ; Dubec, V. ; Pogany, D. ; Gornik, E. ; Dissegna, M. ; Cerati, L. ; Zullino, L. ; Andreini, A. ; Tazzoli, A. ; Meneghesso, G.
Author_Institution :
Inst. for Solid State Electron., Vienna Univ. of Technol., Vienna, Austria
Abstract :
Triggering uniformity and scaling behavior under TLP stress is investigated in single and multi-finger 0.35 mum BCD6 gc-NMOS ESD protection devices. Current flow distribution within a single-finger and over different fingers is analyzed by transient interferometric mapping technique. The steps in IV characteristics are attributed to the particular triggering pattern of fingers. The experiments are validated by TCAD device simulations.
Keywords :
MOSFET; electrostatic discharge; technology CAD (electronics); BCD6 gc-NMOS ESD protection devices; TCAD device simulations; TLP stress; current flow distribution; multi-finger; single finger; size 0.35 mum; transient interferometric mapping technique; Coupling circuits; Current distribution; Electrostatic discharge; Electrostatic interference; Fingers; Low voltage; MOS devices; Protection; Temperature distribution; Transient analysis;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2006. EOS/ESD '06.
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-5853-7115-0
