• DocumentCode
    502653
  • Title

    The impact of substrate resistivity on ESD protection devices

  • Author

    Smedes, T. ; Heringa, A. ; van Zwol, J. ; de Jong, P.C.

  • Author_Institution
    Philips Semiconductors, Gerstweg 2, 6534 AE Nijmegen, the Netherlands
  • fYear
    2002
  • fDate
    6-10 Oct. 2002
  • Firstpage
    357
  • Lastpage
    364
  • Abstract
    The substrate resistivity has a serious impact on the behaviour of ESD protection devices. TLP characterisation and failure analysis show that different failure mechanisms occur, depending on the substrate resistivity. The mechanisms leading to these phenomena are explained and the consequences for porting IO designs to other substrate types are discussed.
  • Keywords
    CMOS technology; Conductivity; Diodes; Electrostatic discharge; Failure analysis; Leakage current; Protection; Silicides; Substrates; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    2002 Electrical Overstress/Electrostatic Discharge Symposium, 2002. EOS/ESD '02.
  • Conference_Location
    Charlotte, NC, USA
  • Print_ISBN
    978-1-5853-7040-5
  • Electronic_ISBN
    978-1-5853-7040-5
  • Type

    conf

  • Filename
    5267001
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=502653