Integrated LTCC-glass microreactor and µTAS with thermal stabilization for biological application

Recently, analytical microdevices are frequently described in technical papers. The muTAS (micrototal analysis system) often implements optical read-outs which require a usage of transparent materials. There is a wide range of materials which are applied to construct devices. However, the analytical ceramics based systems are seldom described. Mechanical, thermal and chemical properties of the LTCC (Low Temperature Co-fired Ceramic) substrate make it an adequate material to build chemical and biochemical reactors. However, alumina ceramics is not transparent. Hence, the transparent material is needed to provide an optical port. In this paper sodium glass material was applied. A tight ceramic microchamber with a sodium glass window and a lateral glass waveguide is presented. Moreover, the structure is equipped with a resistor which works as a heater. The additional thermocouple sensors enable a temperature measurement. As the result, LTCC-glass muTAS with thermal stabilization is obtained. The FEM (finite element method) is used to optimize thermal properties of the designed microstructure. A PC (personal computer) based thermal management system allows for appropriate temperature shifting.