Title :
Measurement of dielectric films´ microwave parameters
Author :
Pashkov, V.M. ; Bovtun, V.P. ; Prokopenko, Yu.V. ; Kempa, M. ; Molchanov, V.I. ; Eremenko, A.V. ; Poplavko, Yu M.
Author_Institution :
Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
Abstract :
A method for studying of the microwave parameters of dielectric films, deposited on high-Q substrate without a metal layer, was developed. The essence of the method is the excitation of a hyperfine dielectric resonator (DR) as a two-layer structure: substrate-film.
Keywords :
dielectric measurement; dielectric resonators; dielectric thin films; microwave measurement; thin film devices; dielectric film deposition; high-Q substrate; hyperfine dielectric resonator excitation; microwave parameter measurement; substrate film; two-layer structure; Chromium; Dielectric films; Dielectric measurements; Electrooptical waveguides; Helium; Microwave measurements; Quadratic programming; Rectangular waveguides;
Conference_Titel :
Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-4796-1
