• DocumentCode
    503442
  • Title

    Nanotechnology of Mn4Si7 epitaxial film formation on monocryctalline silicon

  • Author

    Makogon, Yu.N. ; Pavlova, E.P. ; Sidorenko, S.I. ; Beddies, G.

  • Author_Institution
    Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    615
  • Lastpage
    616
  • Abstract
    This research is devoted to the study of the formation regularities of the Mn4Si7 epitaxial films mediated surfactant Sb in the Mn(25 nm)/Sb(0,2...1 ML)/buffer Si(100 nm)/Si(001) nanodimensional film composition (NFC).
  • Keywords
    epitaxial layers; manganese alloys; nanofabrication; silicon alloys; surfactants; Mn4Si7-Si; Si; epitaxial film formation; monocrystalline silicon; nanotechnology; Chemical technology; Helium; Nanotechnology; Physics; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-4796-1
  • Type

    conf

  • Filename
    5292957
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=503442