Electret based capacitive MEMS vibration-to-electric energy harvesting

Author

Mialtu, Razvan ; Sararoiu, Mihai

Author_Institution

Sense & Control Dept., Infineon Technol. Romania, Bucharest, Romania

Volume

1

fYear

2009

fDate

12-14 Oct. 2009

Firstpage

219

Lastpage

222

Abstract

With the advent of new techniques in ultra-low VLSI design and new MEMS technologies, self-powered systems prove to be a solution to wireless sensor networks with low accessibility for maintenance. This paper includes a new concept for power scavenging based on capacitive MEMS structure. The concept, mathematically proven through MATLAB simulations, is innovative as it does not require any initial or external electrical power supply.

Keywords

capacitive sensors; energy harvesting; microsensors; wireless sensor networks; electret based capacitive MEMS; external electrical power supply; initial electrical power supply; self-powered systems; ultra-low VLSI design; vibration-to-electric energy harvesting; wireless sensor networks; Batteries; Capacitors; Electrets; Energy storage; Frequency conversion; Micromechanical devices; Monitoring; Very large scale integration; Vibration control; Wireless sensor networks; Energy harvesting; electret based MEMS variable capacitor; electrostatic cycles; vibration-to-electricity conversion;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2009. CAS 2009. International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-4413-7

Type

conf

DOI

10.1109/SMICND.2009.5336564

Filename

5336564