Title :
Electret based capacitive MEMS vibration-to-electric energy harvesting
Author :
Mialtu, Razvan ; Sararoiu, Mihai
Author_Institution :
Sense & Control Dept., Infineon Technol. Romania, Bucharest, Romania
Abstract :
With the advent of new techniques in ultra-low VLSI design and new MEMS technologies, self-powered systems prove to be a solution to wireless sensor networks with low accessibility for maintenance. This paper includes a new concept for power scavenging based on capacitive MEMS structure. The concept, mathematically proven through MATLAB simulations, is innovative as it does not require any initial or external electrical power supply.
Keywords :
capacitive sensors; energy harvesting; microsensors; wireless sensor networks; electret based capacitive MEMS; external electrical power supply; initial electrical power supply; self-powered systems; ultra-low VLSI design; vibration-to-electric energy harvesting; wireless sensor networks; Batteries; Capacitors; Electrets; Energy storage; Frequency conversion; Micromechanical devices; Monitoring; Very large scale integration; Vibration control; Wireless sensor networks; Energy harvesting; electret based MEMS variable capacitor; electrostatic cycles; vibration-to-electricity conversion;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336564
