Title :
A structurally multifunctional pressure-temperature sensor
Author :
Sohi, Ali Najafi ; Shavezipur, Mohammad ; Nieva, Patricia ; Khajepour, Amir
Author_Institution :
Department of Mechanical and Mechatronics Engineering, University of Waterloo, Canada
Abstract :
A new multifunctional sensor for simultaneous measurement of pressure and temperature is proposed and modeled. The design includes elastic membranes and bi-layer beams as pressure and temperature sensing bodies, respectively, and capacitance readout for transduction. The bi-layer beams are placed such that their out-of-plane displacements due to different coefficients of thermal expansion change the capacitances between two sets of electrodes. Finite element simulations and post-processing results verify the applicability of the proposed design technique in measurement of pressures up to 1 MPa and temperature changes up to 250 °C.
Keywords :
MEMS; capacitance readout; multifunctional sensor; pressure; temperature;
Conference_Titel :
Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
Conference_Location :
Ottawa, ON, Canada
Print_ISBN :
978-1-4244-4751-0