Multilayer Thickness Determination Using Continuous Wave THz Spectroscopy

Author

Stanze, D. ; Globisch, B. ; Dietz, R.J.B. ; Roehle, H. ; Gobel, T. ; Schell, M.

Author_Institution

Photonic Components Dept., Fraunhofer Heinrich Hertz Inst., Berlin, Germany

Volume

4

Issue

6

fYear

2014

fDate

Nov. 2014

Firstpage

696

Lastpage

701

Abstract

We present a multilayer thickness measurement system based on optoelectronic continuous wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast data acquisition the system combines micrometer precision with short measurement time. In addition, the presented system is not limited by the 2π uncertainty of previous continuous wave signals and is therefore capable of measuring thick layers. Thus, the presented system and measurement method are a cost effective alternative to THz time-domain systems in the field of thickness measurements.

Keywords

multilayers; terahertz spectroscopy; thickness measurement; THz time-domain system; data acquisition; high frequency resolution; micrometer precision; multilayer thickness measurement; optoelectronic continuous wave THz spectroscopy; Frequency-domain analysis; Optical receivers; Optoelectronic devices; Spectroscopy; Submillimeter wave technology; Thickness measurement; Frequency domain; multilayer thickness determination; photomixing; spectroscopy; terahertz (THz);

fLanguage

English

Journal_Title

Terahertz Science and Technology, IEEE Transactions on

Publisher

ieee

ISSN

2156-342X

Type

jour

DOI

10.1109/TTHZ.2014.2348414

Filename

6888534