The integration of SWNTs with CMOS IC

Author

Huang, Jung-Tang ; Lin, Po-Chin ; Chao, Hom-Wi ; Jenq, Kai-Yuan ; Hsu, Hou-Jun ; Tsai, Ting-Chiang

Author_Institution

Dept. of Inst. of Mechatron. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan

fYear

2009

fDate

26-30 July 2009

Firstpage

33

Lastpage

36

Abstract

This paper presents the interconnection of single - walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 Â¿m CMOS process. Using Electroless Nickel and Immersion Gold to cover the electrodes of Al could really increase the current more than 3 orders when SWNTs are connected between electrodes. One of the applications to this chip may be gas sensing, after coupling SWNTs the electrodes will treat by NH₃. The electrodes and circuits integration with CMOS IC and its measurement will be described in this paper.

Keywords

CMOS integrated circuits; aluminium; carbon nanotubes; electrodes; integrated circuit interconnections; Al; C; CMOS integrated circuit chip; Electroless Nickel; Immersion Gold; electrodes; interconnection; single walled carbon nanotube; CMOS integrated circuits; CMOS process; Carbon nanotubes; Coupling circuits; Electrodes; Gold; Integrated circuit interconnections; Integrated circuit measurements; Nickel; Semiconductor device measurement; CMOS; Electroless Nickel Immersion Gold; SWNT;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on

Conference_Location

Genoa

ISSN

1944-9399

Print_ISBN

978-1-4244-4832-6

Electronic_ISBN

1944-9399

Type

conf

Filename

5394540