DocumentCode :
511574
Title :
Transfer printing of the functionalized carbon nanotubes aligned by DEP
Author :
Huang, Jung-Tang ; Yeh, Fang-Hsun ; Lin, Po-Chin ; Lu, Chih-Cheng
Author_Institution :
Dept. of Inst. of Mechatornic Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan
fYear :
2009
fDate :
26-30 July 2009
Firstpage :
674
Lastpage :
677
Abstract :
Dielectrophoresis force (DEP) has been the most common way to manipulate Carbon nanotubes either multi walled carbon nanotbues(MWCNTs) or single walled carbon nanotubes(SWNTs) for the fabrication of nanoscale electronic devices, recently. Nevertheless, with limitation of substrate areas or the restriction of operation voltage of substrate, for example the chip with circuits based on CMOS-NEMS, dielectrophoresis force is not the best method to fabricate nanoscale devices. Therefore, we here demonstrate a new method for the fabrication of the nanoscale devices based on CNTs. We first functionalize carbon nanotubes, and then combine transfer-printing mechanism with aligned carbon nanotubes networks by DEP process. In this work, we successfully perform CNTs alignment on the large scale parallel electrodes via DEP. Also, current-induced electrical breakdown is introduced to eliminate undesired type of SWCNTs, which could improve the yield of nanoscale devices such as CNTFETs. Afterwards transferring the alignment of Carbon nanotubes by PDMS is implemented to the functionalized gold electrodes. By means of it, we can easily fabricate MOSFETs, Bio-sensors or Gas sensors based on CMOS-NEMs process scale or where it is not appropriated to perform DEP to construct nanoscale devices.
Keywords :
carbon nanotubes; electric breakdown; electrophoresis; nanotechnology; printing; C; CNTFETs; current-induced electrical breakdown; dielectrophoresis force; functionalized carbon nanotubes; functionalized gold electrodes; large scale parallel electrodes; multi walled carbon nanotbues; nanoscale devices; single walled carbon nanotubes; transfer printing; Carbon nanotubes; Circuits; Dielectrophoresis; Electric breakdown; Electrodes; Fabrication; Large-scale systems; Nanoscale devices; Printing; Voltage; Dielectrophoresis force (DEP); Transfer Printing; component;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
ISSN :
1944-9399
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
Type :
conf
Filename :
5394775
Link To Document :
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