The Automatic Generation of Conformal 3D data for Simulation of IC Interconnect Parasitics and Representation of MEM Structures

A software tool which automatically generates planar, conformal and semi-conformal 3D representations of an IC direct from the 2D layout is reported. The basic concepts behind the algorithm used by the tool are described, and the creation of a semi-conformal description of a simple circuit illustrated. Results are presented that demonstrate the importance of using 3D capacitance extraction to accurately simulate circuit performance. The degree of success with which the 3DTOP software represents actual IC topography is illustrated. The application of the software tool in representation of MEMS is described.