DocumentCode
513775
Title
Precise Extraction of Contact Resistivitiy from TLM Structures
Author
Prasad, S.J.
Author_Institution
Electronics Research Labs, Tektronix, MS 50-470, Beaverton, OR 97077. USA. TEL: (503) 627-2576 FAX: (503) 627-5502
fYear
1995
fDate
25-27 Sept. 1995
Firstpage
579
Lastpage
582
Keywords
Conductivity; Contact resistance; Electrical resistance measurement; Frequency measurement; Germanium alloys; Heterojunction bipolar transistors; Manganese alloys; Microwave measurements; Size measurement; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location
The Hague, The Netherlands
Print_ISBN
286332182X
Type
conf
Filename
5436054
Link To Document