Title :
Precise Extraction of Contact Resistivitiy from TLM Structures
Author_Institution :
Electronics Research Labs, Tektronix, MS 50-470, Beaverton, OR 97077. USA. TEL: (503) 627-2576 FAX: (503) 627-5502
Keywords :
Conductivity; Contact resistance; Electrical resistance measurement; Frequency measurement; Germanium alloys; Heterojunction bipolar transistors; Manganese alloys; Microwave measurements; Size measurement; Thickness measurement;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands
