DocumentCode
513800
Title
TCAD for MEMS
Author
Korvink, J.G. ; Bachtold, M. ; Emmenegger, M. ; Paganini, R. ; Ruehl, R. ; Funk, J. ; Baltes, H.
Author_Institution
Physical Electronics Laboratory, ETH Zurich, Switzerland
fYear
1996
fDate
9-11 Sept. 1996
Keywords
Acceleration; Actuators; Computational modeling; Couplings; Geometry; Laboratories; Micromechanical devices; Monte Carlo methods; SPICE; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5436127
Link To Document