DocumentCode
513882
Title
A new measurement method of interface-state parameters, based on dark current characterization in CCDs
Author
Toren, W.J. ; Bisschop, J. ; Widdershoven, F.P.
Author_Institution
Philips Imaging Technology (Philips Research Laboratories), Prof Holstlaan 4, 5656 AA Eindhoven, The Netherlands. E-mail: toren@natlab.research.philips.com
fYear
1996
fDate
9-11 Sept. 1996
Firstpage
387
Lastpage
390
Abstract
A new measurement method to characterize the extremely-low dark-current generation rate of interface states in a buried-channel n-type CCD image sensor will be presented. With this method the capture cross section and the interface-state density can be determined with one single static measurement at room temperature. Besides the average dark current generation rate, this method also uses the dark current distribution of all pixels of the CCD. The shape of this distribution gives an extra parameter with which the results can be obtained. The accuracy of this method is much higher than methods that use a dynamic measurement sequence, because the newly proposed method can be done at one temperature and does not need to be exponentially fitted.
Keywords
Character generation; Charge coupled devices; Charge-coupled image sensors; Current measurement; Dark current; Density measurement; Interface states; Shape; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5436242
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