DocumentCode
514082
Title
The Effect of the Proximity of the Bird´s Beak on Aging of the Thin Oxide by High Field Current Stress
Author
Marchetaux, J.-C. ; Doyle, B. ; Boudou, A.
Author_Institution
BULL S.A., Ave Jean-Jaures, 78340 Les Clayes sous Bois, FRANCE.
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
713
Lastpage
716
Keywords
Aging; Capacitance-voltage characteristics; Capacitors; Circuits; Electrons; Fabrication; Interface states; Stress; Very large scale integration; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436728
Link To Document