DocumentCode
514183
Title
Multi-Dimensional Process Simulation Software Integration in Prompt
Author
Fichtner, W. ; Regli, P.
Author_Institution
Integrated Systems Laboratory, Swiss Federal Inst. of Technology, Zurich, Switzerland; ISE Integrated Systems Engineering AG, Zurich, Switzerland
fYear
1996
fDate
9-11 Sept. 1996
Firstpage
335
Lastpage
342
Abstract
During the past five years, multi-dimensional process simulation tools advanced considerably. The inherent complexities of the underlying physical models, however, together with the enormous computational expense of three-dimensional simulation, ask for a modular and distributed approach. In this paper, we review the basic concepts of the PROMPT collaboration towards multi-dimensional process simulation between several research sites and industrial software houses in Europe. While the results of this project are extremely encouraging, several obstacles have to be overcome before three-dimensional process simulation can become an everyday tool.
Keywords
Circuit simulation; Collaborative software; Computational modeling; Lithography; Mesh generation; Microelectronics; Numerical simulation; Semiconductor device modeling; Software tools; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5437048
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