• DocumentCode
    514183
  • Title

    Multi-Dimensional Process Simulation Software Integration in Prompt

  • Author

    Fichtner, W. ; Regli, P.

  • Author_Institution
    Integrated Systems Laboratory, Swiss Federal Inst. of Technology, Zurich, Switzerland; ISE Integrated Systems Engineering AG, Zurich, Switzerland
  • fYear
    1996
  • fDate
    9-11 Sept. 1996
  • Firstpage
    335
  • Lastpage
    342
  • Abstract
    During the past five years, multi-dimensional process simulation tools advanced considerably. The inherent complexities of the underlying physical models, however, together with the enormous computational expense of three-dimensional simulation, ask for a modular and distributed approach. In this paper, we review the basic concepts of the PROMPT collaboration towards multi-dimensional process simulation between several research sites and industrial software houses in Europe. While the results of this project are extremely encouraging, several obstacles have to be overcome before three-dimensional process simulation can become an everyday tool.
  • Keywords
    Circuit simulation; Collaborative software; Computational modeling; Lithography; Mesh generation; Microelectronics; Numerical simulation; Semiconductor device modeling; Software tools; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
  • Conference_Location
    Bologna, Italy
  • Print_ISBN
    286332196X
  • Type

    conf

  • Filename
    5437048