DocumentCode
515467
Title
Silicon waveguide coupled resonator infrared detector
Author
Shafiiha, R. ; Zheng, D. ; Liao, S. ; Dong, P. ; Liang, H. ; Feng, N. ; Luff, B.J. ; Feng, D. ; Li, Guoliang ; Cunningham, John ; Raj, Kannan ; Krishnamoorthy, Ashok V. ; Asghari, M.
Author_Institution
Kotura Inc., Monterey Park, CA, USA
fYear
2010
fDate
21-25 March 2010
Firstpage
1
Lastpage
3
Abstract
We present a silicon photodiode implemented in a waveguide coupled ring resonator structure. Infrared detection was achieved by Si+ ion implantation. A 15 ¿m-radius ring-based detector demonstrated an equivalent responsivity to a 3 mm straight waveguide device.
Keywords
cavity resonators; infrared detectors; ion implantation; silicon; waveguide couplers; equivalent responsivity; infrared detection; ion implantation; silicon waveguide coupled resonator; size 3 mm; waveguide coupled ring resonator structure; waveguide device; Absorption; Doping; Infrared detectors; Integrated optics; Ion implantation; Optical coupling; Optical ring resonators; Optical waveguides; Particle beam optics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication (OFC), collocated National Fiber Optic Engineers Conference, 2010 Conference on (OFC/NFOEC)
Conference_Location
San Diego, CA
Electronic_ISBN
978-1-55752-884-1
Type
conf
Filename
5465176
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