Title :
A SEM Video Gating System for Dynamic Inspection of Integrated Circuits
Author :
Ranasinghe, D. ; Proctor, G. ; Speight, J.D.
Abstract :
The application of an SEM video gating system to dynamic inspection of large scale integrated circuits is discussed. The use of the technique to isolate design faults in a prototype scrambler/descrambler circuit is described.
Keywords :
dynamic testing; integrated circuit testing; integrated circuits; large scale integration; scanning electron microscopy; SEM video gating system; dynamic inspection; large scale integrated circuits; prototype scrambler-descrambler circuit; Blanking; Circuit faults; Clocks; Electron beams; Inspection; Large scale integration; Prototypes; Pulse measurements; Registers; Scanning electron microscopy;
Conference_Titel :
Solid State Circuits Conference - Digest of Technical Papers, 1978. ESSCIRC 78. 4th European
Conference_Location :
Amsterdam
