Title :
Electric Force Microscope Probing Inside the Intel Pentium-Micro Processor
Author :
Sprengepiel, J. ; Böhm, C. ; Kubalek, E.
Author_Institution :
Gerhard-Mercator-Universitÿt-GH-Duisburg, Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
Abstract :
We present contactless signal measurements inside a 100 MHz Intel Pentium micro processor carried out with a scanning force microscope (SFM) tester. This new test technique offers voltage contrast within passivated integrated circuits with nanometer spatial resolution and gigahertz measurement bandwidth. Contactless device internal waveform measurements up to 320 MHz on the clock line of a passivated 100 MHz Pentium micro processor using electrical sampling technique will be shown.
Keywords :
Bandwidth; Circuit testing; Contacts; Force measurement; Integrated circuit measurements; Integrated circuit testing; Microscopy; Signal processing; Spatial resolution; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 1995. ESSCIRC '95. Twenty-first European
Conference_Location :
Lille, France
Print_ISBN :
2-86332-180-3
