DocumentCode
517247
Title
Electric Force Microscope Probing Inside the Intel Pentium-Micro Processor
Author
Sprengepiel, J. ; Böhm, C. ; Kubalek, E.
Author_Institution
Gerhard-Mercator-Universitÿt-GH-Duisburg, Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
fYear
1995
fDate
19-21 Sept. 1995
Firstpage
270
Lastpage
273
Abstract
We present contactless signal measurements inside a 100 MHz Intel Pentium micro processor carried out with a scanning force microscope (SFM) tester. This new test technique offers voltage contrast within passivated integrated circuits with nanometer spatial resolution and gigahertz measurement bandwidth. Contactless device internal waveform measurements up to 320 MHz on the clock line of a passivated 100 MHz Pentium micro processor using electrical sampling technique will be shown.
Keywords
Bandwidth; Circuit testing; Contacts; Force measurement; Integrated circuit measurements; Integrated circuit testing; Microscopy; Signal processing; Spatial resolution; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1995. ESSCIRC '95. Twenty-first European
Conference_Location
Lille, France
Print_ISBN
2-86332-180-3
Type
conf
Filename
5469383
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