Title :
Multilayered magneto-impedance microsensors for non destructive control
Author :
Moulin, Johan ; Woytasik, Marion ; Shahosseini, Iman ; Alves, F.
Author_Institution :
IEF, Univ. Paris Sud XI, Orsay, France
Abstract :
Magnetic field microsensors based on the magneto-impedance phenomenon have been fabricated by stacking up ferromagnetic/conductive/ferromagnetic films. Their sensitivity is in the same range than macroscopic devices (i.e. 400 V/T/A) and is constant from 0 to 500 A m-1. The ferromagnetic layer is a Finemet® alloy. Initially an amorphous material, it is nanocrystallized by heat treatment. Its magnetic properties have been optimized in order to induce transversal anisotropy.
Keywords :
crystallisation; ferromagnetism; heat treatment; magnetic anisotropy; microsensors; nanostructured materials; sensitivity; amorphous material; conductive film; fabrication; ferromagnetic layer; heat treatment; magnetic field microsensors; magneto-impedance phenomenon; nanocrystalline; non destructive control; sensitivity; transversal anisotropy; Amorphous magnetic materials; Amorphous materials; Conductive films; Iron alloys; Magnetic anisotropy; Magnetic fields; Magnetic films; Microsensors; Perpendicular magnetic anisotropy; Stacking;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
