Title :
Hermetic BSG thin film coatings for harsh environment applications
Author :
Maus, S. ; Hansen, U. ; Leib, J. ; Toepper, M.
Author_Institution :
MSG Lithoglas AG, Berlin, Germany
Abstract :
The use of a plasma-assisted e-beam evaporation process enables a cost-efficient exploitation of the outstanding material properties of borosilicate glass - a chemically very inert material with minimal moisture absorption, excellent optical properties and excellent time and temperature stability. This paper gives further insight on the deposition and structuring of borosilicate glass films and the achievable film properties as well as feasible applications.
Keywords :
borosilicate glasses; coating techniques; evaporation; thin films; borosilicate glass films; harsh environment application; hermetic BSG thin film coatings; inert material; material properties; moisture absorption; optical properties; plasma-assisted e-beam evaporation process; temperature stability; Coatings; Glass; Optical films; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties; Plasma stability; Plasma temperature; Transistors;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
